February_20_2023_Board_Book.pdf — PaddleOCR-VL (Baidu)

Stage control software includes standard facilities for:

Store and recall of sample position
Double-click-to-center and drag-to-zoom feature select functions
Multi-directional stage drive
Compucentric rotation
Compucentric tilt
Image feature alignment to horizontal or vertical
Navigation on image and navigation montage is supported with “Click-to-center” and “Drag-to-Zoom” functions
External image import and registration for correlation.

Intuitive, photo-based sample navigation is provided by the Nav-Cam™. The Nav-Cam is a color optical camera, mounted directly to the chamber for acquiring an image of samples mounted on the specimen stage. Fully integrated in the user interface, the Nav-Cam allows for quick point-and-click navigation to the region of interest. Nav-Cam features:

Automatic image acquisition with sample lighting
160 x 105 mm field of view
3072 x 2048 pixels or approximately 6 megapixels
Digital zoom
Image annotation
Image save

Electron Optics

Apreo 2 S LoVac features a pre-aligned electron optical column, which is optimized for high resolution and for beam stability. Apreo 2 features SmartAlign technology which keeps the column aligned without manual intervention. The main elements of the electron optical system are:

Source: Field emission gun assembly with Schottky emitter source. The assembly is optimized for high brightness/high current, providing low-noise imaging. The pre-alignment of the FEG ensures no mechanical alignment is required. Easy gun installation and maintenance is provided with Auto bake-out and Auto Start capabilities.

Final Lens: Dual Objective combining field-free magnetic and electrostatic lenses, extended to a triple-mode compound electrostatic-magnetic final lens by the Immersion Lens. The pole piece has a 60circ design.

Beam deceleration: Can be activated for getting higher surface sensitivity and contrast using low and very low landing energies. Beam deceleration is implemented as an additional degree of freedom to optimize contrast and surface sensitivity while improving the optical performance of the electron column

Voltage: 200 eV to 30 keV (20 eV landing energy possible with Beam Deceleration)

Beam Current: 1 pA to 50 nA (up to 400 nA available as option)

Resolution (optimal working distance):

Resolution (optimal working distance). High vacuum, field-free mode 0.7 nm at 30 kV (STEM) 0.9 nm at 15 kV (with beam deceleration) 1.2 nm at 1 kV 1.0 nm at 1 kV (with beam deceleration) 1.2 nm at 500 V (with beam deceleration) High vacuum, immersion mode 0.9 nm at 1 kV High vacuum, immersion mode with beam deceleration 0.5 nm at 15 kV 0.8 nm at 1 kV 1.0 nm at 1 kV, 10 mm WD 0.8 nm at 500 V 1.2 nm at 200 V