Apreo 2 S LoVac is a Schottky Field Emission Scanning Electron Microscope (FESEM) that combines high- and low-voltage ultra-high resolution capabilities with an electrostatic lens design together with a low vacuum mode for charge compensation on non-conductive material. The instrument features beam deceleration and unique in-lens detection offering unprecedented contrast and versatility to researchers working with a variety of materials and devices.
The key enabling technologies are all integrated onto a single platform and comprise:
Novel Field Emission Electron Optics optimized for both high current and high resolution meeting all imaging and analysis needs
Trinity detection system for fast imaging, and easy collection of all available signals
High-precision specimen goniometer with 110 mm travel along the x and y axes
A Windows 10, 4-view "Beam per View" User Interface with User Guidance
System architecture is optimized for automation, which is optionally available (e.g. MAPS™)
Features and specifications:
Vacuum
Apreo 2 S LoVac uses an entirely oil-free vacuum system, featuring:
1x 240 l/s turbomolecular drag pump
1x Scroll pumps
2x Ion Getter Pumps
Integrated battery backup for IGPs on the electron column, a FEG safety mechanism (for recoverability after an unplanned power outage)
Auto bake-out and Auto-start enable fast and easy maintenance of the FEG source
Low vacuum mode up to 500 Pa for charge compensation of non-conductive samples
Seamless switching between high vacuum and low vacuum with an automated mechanism for attachment of a pressure limiting aperture to the pole piece
Sample Navigation
Apreo 2 S LoVac is standard equipped with a 5-axes motorized x-y-z-tilt-rotate stage, providing movements:
X and Y range: 110 mm (motorized); Z range: 65 mm (motorized)
Tilt: -15 to +90 degrees (motorized)
Eucentric tilt
A unique standard specimen holder with labeled positions and unique stage mounting, allowing simultaneous loading of 18 standard samples (varnothing 12 mm), three 45circ pre-tilted samples, two row bars (one in horizontal and one in 52circ pre-tilted position), and a spring-loaded clamp holder for mounting cross-sections.
A selection of additional sample holder kits is optionally available (including stub holders, additional TEM sample holders and vise specimen holders).
Joystick stage control is available as an option.
Confidential
FEI Company • 5350 NE Dawson Creek Drive • Hillsboro, Oregon 97124
Tel: 503-726-7500 • Fax: 503-726-2570
Please reference our quotation number in all related correspondence