Electron beam parameter space

Beam current range 1 pA–50 nA (400 nA configuration also available)

Accelerating voltage range 200 V–30 kV

Landing energy range 20 eV–30 keV (in serial block-face imaging SEM 500 V–6 kV)

Max. horizontal field width 3 mm at 10 mm WD (corresponds to 29x min magnification)

Chamber

Inner width 340 mm

Analytical working distance 10 mm

Ports 12

EDS take-off angle 35°

Options Three simultaneous EDS detectors possible; two at 180°

Coplanar EDS/EBSD orthogonal to the tilt axis of the stage

Detectors The Apreo 2 SEM detects up to four signals simultaneously from any combination of the available detectors or detector segments*:

Trinity Detection System (in-lens and in-column) T1 segmented lower in-lens detector

T2 upper in-lens detector

T3 in-column detector*

VS-DBS: LoVac lens mounted BSED (for Volumescope System)

ETD—Everhart-Thornley SE detector

DBS—Retractable segmented under-the-lens BSED*

Low-vacuum SE detector*

DBS-GAD—Lens-mounted gaseous analytical BSED*

STEM 3+—Retractable segmented detector (BF, DF, HADF, HAADF)*

IR-CCD

Nav-Cam+ Camera (chamber-mounted)

Vacuum system Complete oil-free vacuum system

1 × 240 l/s TMP

1 × PVP-scroll

2 × IGP

Chamber vacuum (high vacuum) <6.3 × 10-6 mbar\n(after 12 hours pumping without Volumescope System)*\n(after 72 hours pumping with Volumescope System)

Evacuation time: ≤3.5 minute

Optional low-vacuum mode up to 50 Pa for charge compensation of non-conductive samples

10–500 Pa chamber pressure

Automatic Pressure Limiting Aperture (PLA) Loader

Sample holders Standard multi-purpose holder uniquely mounts directly onto the stage, hosts up to 18 standard stubs (Ø12 mm), three pre-tilted stubs, cross-section samples, and two pre-tilted row-bar holders*\n(38° and 90°). Tools are not required to mount a sample.

Each optional row-bar accommodates 6 S/TEM grids

Wafer and custom holders*

3D imaging Volumescope System Array Tomography

Resolution High image quality in Z direction @ 10 nm isotropic resolution (using MED-SEM) The achievable resolution is dependent of the SEM column that is used.

Control software Maps Software Maps Software

Visualization software Amira Software for Life Sciences Amira Software for Life Sciences

Post processing software Multi-Energy Deconvolution SEM (MED-SEM)