Electron beam parameter space
Beam current range 1 pA–50 nA (400 nA configuration also available)
Accelerating voltage range 200 V–30 kV
Landing energy range 20 eV–30 keV (in serial block-face imaging SEM 500 V–6 kV)
Max. horizontal field width 3 mm at 10 mm WD (corresponds to 29x min magnification)
Chamber
Inner width 340 mm
Analytical working distance 10 mm
Ports 12
EDS take-off angle 35°
Options Three simultaneous EDS detectors possible; two at 180°
Coplanar EDS/EBSD orthogonal to the tilt axis of the stage
Detectors The Apreo 2 SEM detects up to four signals simultaneously from any combination of the available detectors or detector segments*:
Trinity Detection System (in-lens and in-column) T1 segmented lower in-lens detector
T2 upper in-lens detector
T3 in-column detector*
VS-DBS: LoVac lens mounted BSED (for Volumescope System)
ETD—Everhart-Thornley SE detector
DBS—Retractable segmented under-the-lens BSED*
Low-vacuum SE detector*
DBS-GAD—Lens-mounted gaseous analytical BSED*
STEM 3+—Retractable segmented detector (BF, DF, HADF, HAADF)*
IR-CCD
Nav-Cam+ Camera (chamber-mounted)
Vacuum system Complete oil-free vacuum system
1 × 240 l/s TMP
1 × PVP-scroll
2 × IGP
Chamber vacuum (high vacuum) <6.3 × 10-6 mbar\n(after 12 hours pumping without Volumescope System)*\n(after 72 hours pumping with Volumescope System)
Evacuation time: ≤3.5 minute
Optional low-vacuum mode up to 50 Pa for charge compensation of non-conductive samples
10–500 Pa chamber pressure
Automatic Pressure Limiting Aperture (PLA) Loader
Sample holders Standard multi-purpose holder uniquely mounts directly onto the stage, hosts up to 18 standard stubs (Ø12 mm), three pre-tilted stubs, cross-section samples, and two pre-tilted row-bar holders*\n(38° and 90°). Tools are not required to mount a sample.
Each optional row-bar accommodates 6 S/TEM grids
Wafer and custom holders*
3D imaging Volumescope System Array Tomography
Resolution High image quality in Z direction @ 10 nm isotropic resolution (using MED-SEM) The achievable resolution is dependent of the SEM column that is used.
Control software Maps Software Maps Software
Visualization software Amira Software for Life Sciences Amira Software for Life Sciences
Post processing software Multi-Energy Deconvolution SEM (MED-SEM)