Analytical applications
ChemiSEM image of "Salt and Pepper" imaged at 15 kV with the T1 in-lens backscatter detector and integrated EDS ChemiSEM EDS detector. The image on the left shows backscatter contrast of the particles on a carbon sticky tab. The image on the right shows the live, automatically applied elemental image for sodium (Na), representing the salt and oxygen-rich pepper in blue (O), and (C) showing the carbon sticky tape. Note the similarity of the phases in backscatter, yet the elemental analysis clearly shows the phase separation. This extra color can help you distinguish between phases that could otherwise be confused.
Electron optics
High-resolution FEG column with High-stability Schottky field emission gun to provide stable high-resolution analytical currents
Compound final lens: a combined electrostatic, field-free magnetic and immersion magnetic objective lens
60° objective lens geometry allows for tilting of larger samples
Automated heated apertures to ensure cleanliness and touch-free aperture changes
SmartAlign Technology for user-free alignment
Through-the-lens differential pumping for low vacuum* reduces beam skirting for accurate analysis and high resolution
Beam deceleration with stage bias from -4,000 V to +600 V
Continuous beam current control and optimized aperture angle
Double stage scanning deflection
Easy gun installation and maintenance: auto bake-out, auto start, no mechanical alignments
PivotBeam Mode for selected area electron channeling, also known as rocking beam mode (Apreo 2 S SEM only)
Guaranteed minimum source lifetime: 24 months
Guaranteed minimum source lifetime: 24 months
Electron beam resolution
Apreo 2 SEMApreo 2 C SEMApreo 2 S SEM
Final lensElectrostaticCompound
High-vacuum resolution
30 kV (STEM)0.7 nm0.7 nm
15 kV (BD)0.9 nm0.5 nm
15 kV (6.4 nA, WD 10 mm)
1 kV1.2 nm0.9 nm
1 kV (BD)1.0 nm0.8 nm
1 kV (BV, WD 10 mm)1.0 nm
500 V (BD)1.2 nm0.8 nm
200 V (BD)1.2 nm
Low-vacuum resolution*
3 kV (30 Pa)1.8 nm1.8 nm
15 kV (30 Pa)1.2 nm1.2 nm