{ "document_id": 14957, "page": 52, "width_pt": 595.276, "height_pt": 841.89, "rotation": 0, "pipeline_version": "paddleocr-vl-1.6+paul-48", "engine": "paddleocr_vl", "source_run_id": 15071, "item_count": 22, "counts_by_type": { "table": 1, "table_cell": 21 }, "build_ms": 7, "items": [ { "id": "p52.1", "order": 1, "type": "table", "bbox": { "l": 34.3105, "t": 806.3713, "r": 560.2457, "b": 28.319 }, "text": "", "attrs": { "block_label": "table", "n_rows": 11, "n_cols": 3, "integrity": { "cells_checked": 21, "cells_flagged": 0 } }, "children": [ { "id": "p52.1.1", "order": 2, "type": "table_cell", "bbox": { "l": 40.0032, "t": 803.8167, "r": 187.5212, "b": 791.7667 }, "text": "Electron beam parameter space", "attrs": { "row": 0, "col": 0, "rowspan": 1, "colspan": 3, "bbox_refit": true } }, { "id": "p52.1.2", "order": 3, "type": "table_cell", "bbox": { "l": 40.0032, "t": 787.0283, "r": 146.4381, "b": 726.1973 }, "text": "Beam current range\nAccelerating voltage range\nLanding energy range\nMax. horizontal field width", "attrs": { "row": 1, "col": 0, "rowspan": 1, "colspan": 1, "bbox_refit": true, "merged_continuation": true } }, { "id": "p52.1.3", "order": 4, "type": "table_cell", "bbox": { "l": 179.7552, "t": 787.0283, "r": 421.1478, "b": 726.1973 }, "text": "1 pA–50 nA (400 nA configuration also available)\n200 V–30 kV\n20 eV–30 keV (in serial block-face imaging SEM 500 V–6 kV)\n3 mm at 10 mm WD (corresponds to 29x min magnification)", "attrs": { "row": 1, "col": 1, "rowspan": 1, "colspan": 2, "bbox_refit": true, "merged_continuation": true } }, { "id": "p52.1.4", "order": 5, "type": "table_cell", "bbox": { "l": 40.0032, "t": 706.3167, "r": 82.4892, "b": 694.2667 }, "text": "Chamber", "attrs": { "row": 2, "col": 0, "rowspan": 1, "colspan": 3, "bbox_refit": true } }, { "id": "p52.1.5", "order": 6, "type": "table_cell", "bbox": { "l": 40.0032, "t": 689.5283, "r": 149.1903, "b": 612.0653 }, "text": "Inner width\nAnalytical working distance\nPorts\nEDS take-off angle\nOptions", "attrs": { "row": 3, "col": 0, "rowspan": 1, "colspan": 1, "bbox_refit": true, "merged_continuation": true } }, { "id": "p52.1.6", "order": 7, "type": "table_cell", "bbox": { "l": 179.7552, "t": 689.5283, "r": 414.9126, "b": 595.4332999999999 }, "text": "340 mm\n10 mm\n12\n35°\nThree simultaneous EDS detectors possible; two at 180°\nCoplanar EDS/EBSD orthogonal to the tilt axis of the stage", "attrs": { "row": 3, "col": 1, "rowspan": 1, "colspan": 2, "bbox_refit": true, "merged_continuation": true } }, { "id": "p52.1.7", "order": 8, "type": "table_cell", "bbox": { "l": 40.0032, "t": 589.7363, "r": 78.7374, "b": 578.8013 }, "text": "Detectors", "attrs": { "row": 4, "col": 0, "rowspan": 12, "colspan": 1, "bbox_refit": true } }, { "id": "p52.1.8", "order": 9, "type": "table_cell", "bbox": { "l": 179.7552, "t": 589.7363, "r": 531.1179, "b": 566.8043 }, "text": "The Apreo 2 SEM detects up to four signals simultaneously from any combination of the available detectors or detector segments*:", "attrs": { "row": 4, "col": 1, "rowspan": 1, "colspan": 2, "bbox_refit": true } }, { "id": "p52.1.9", "order": 10, "type": "table_cell", "bbox": { "l": 179.7552, "t": 563.3033, "r": 539.1036, "b": 376.2473 }, "text": "Trinity Detection System (in-lens and in-column)\nT2 upper in-lens detector\nT3 in-column detector *\nVS-DBS: LoVac lens mounted BSED (for Volumescope System)\nETD—Everhart-Thornley SE detector\nDBS—Retractable segmented under-the-lens BSED *\nLow-vacuum SE detector *\nDBS-GAD—Lens-mounted gaseous analytical BSED *\nSTEM 3+—Retractable segmented detector (BF, DF, HADF, HAADF) *\nIR-CCD\nNav-Cam+ Camera (chamber-mounted)", "attrs": { "row": 5, "col": 0, "rowspan": 4, "colspan": 1, "bbox_refit": true, "merged_continuation": true } }, { "id": "p52.1.10", "order": 11, "type": "table_cell", "bbox": { "l": 378.1782, "t": 563.3033, "r": 524.385, "b": 552.3683 }, "text": "T1 segmented lower in-lens detector", "attrs": { "row": 5, "col": 1, "rowspan": 1, "colspan": 1, "bbox_refit": true } }, { "id": "p52.1.11", "order": 12, "type": "table_cell", "bbox": { "l": 40.0032, "t": 370.5503, "r": 553.3596, "b": 204.7613 }, "text": "Vacuum system\n1 × 240 l/s TMP\n1 × PVP-scroll\n2 × IGP\nChamber vacuum (high vacuum) <6.3 × 10-6 mbar\\n(after 12 hours pumping without Volumescope System) *\\n(after 72 hours pumping with Volumescope System)\nEvacuation time: ≤3.5 minute\nOptional low-vacuum mode up to 50 Pa for charge compensation of non-conductive samples\n10–500 Pa chamber pressure\nAutomatic Pressure Limiting Aperture (PLA) Loader", "attrs": { "row": 6, "col": 0, "rowspan": 9, "colspan": 1, "bbox_refit": true, "merged_continuation": true } }, { "id": "p52.1.12", "order": 13, "type": "table_cell", "bbox": { "l": 179.7552, "t": 370.5503, "r": 313.3665, "b": 359.6153 }, "text": "Complete oil-free vacuum system", "attrs": { "row": 6, "col": 1, "rowspan": 1, "colspan": 2, "bbox_refit": true } }, { "id": "p52.1.13", "order": 14, "type": "table_cell", "bbox": { "l": 40.0032, "t": 199.0643, "r": 102.6693, "b": 188.12929999999994 }, "text": "Sample holders", "attrs": { "row": 7, "col": 0, "rowspan": 3, "colspan": 1, "bbox_refit": true } }, { "id": "p52.1.14", "order": 15, "type": "table_cell", "bbox": { "l": 179.7552, "t": 199.0643, "r": 554.2749, "b": 164.13530000000003 }, "text": "Standard multi-purpose holder uniquely mounts directly onto the stage, hosts up to 18 standard stubs (Ø12 mm), three pre-tilted stubs, cross-section samples, and two pre-tilted row-bar holders *\\n(38° and 90°). Tools are not required to mount a sample.", "attrs": { "row": 7, "col": 1, "rowspan": 1, "colspan": 2, "bbox_refit": true } }, { "id": "p52.1.15", "order": 16, "type": "table_cell", "bbox": { "l": 179.7552, "t": 160.63429999999994, "r": 393.3324, "b": 133.06729999999993 }, "text": "Each optional row-bar accommodates 6 S/TEM grids\nWafer and custom holders *", "attrs": { "row": 8, "col": 0, "rowspan": 1, "colspan": 2, "bbox_refit": true, "merged_continuation": true } }, { "id": "p52.1.16", "order": 17, "type": "table_cell", "bbox": { "l": 40.0032, "t": 118.31669999999997, "r": 91.9522, "b": 90.5933 }, "text": "3D imaging\nResolution", "attrs": { "row": 9, "col": 0, "rowspan": 1, "colspan": 1, "bbox_refit": true, "merged_continuation": true } }, { "id": "p52.1.17", "order": 18, "type": "table_cell", "bbox": { "l": 179.7532, "t": 118.47669999999994, "r": 345.5514, "b": 78.59630000000004 }, "text": "Volumescope System\nHigh image quality in Z direction @ 10 nm\\nisotropic resolution (using MED-SEM)", "attrs": { "row": 9, "col": 1, "rowspan": 1, "colspan": 1, "bbox_refit": true, "merged_continuation": true } }, { "id": "p52.1.18", "order": 19, "type": "table_cell", "bbox": { "l": 378.1782, "t": 118.47669999999994, "r": 544.8618, "b": 78.59630000000004 }, "text": "Array Tomography\nThe achievable resolution is dependent of the SEM column that is used.", "attrs": { "row": 9, "col": 2, "rowspan": 1, "colspan": 1, "bbox_refit": true, "merged_continuation": true } }, { "id": "p52.1.19", "order": 20, "type": "table_cell", "bbox": { "l": 40.0032, "t": 75.09529999999995, "r": 142.0722, "b": 30.896299999999997 }, "text": "Control software\nVisualization software\nPost processing software", "attrs": { "row": 10, "col": 0, "rowspan": 1, "colspan": 1, "bbox_refit": true, "merged_continuation": true } }, { "id": "p52.1.20", "order": 21, "type": "table_cell", "bbox": { "l": 179.7552, "t": 75.09529999999995, "r": 508.9293, "b": 30.896299999999997 }, "text": "Maps Software\nAmira Software for Life Sciences\nMulti-Energy Deconvolution SEM (MED-SEM)", "attrs": { "row": 10, "col": 1, "rowspan": 1, "colspan": 1, "bbox_refit": true, "merged_continuation": true } }, { "id": "p52.1.21", "order": 22, "type": "table_cell", "bbox": { "l": 179.7552, "t": 75.09529999999995, "r": 310.5063, "b": 47.528299999999945 }, "text": "Maps Software\nAmira Software for Life Sciences", "attrs": { "row": 10, "col": 2, "rowspan": 1, "colspan": 1, "bbox_refit": true, "merged_continuation": true } } ] } ], "excluded_furniture": { "first": [], "last": [] } }